System Level Model of MEMS Clamped-Clamped Beam in VHDL-AMS generated by ANSYS ROM Tool

Reference:

Release 11.0 Documentation for ANSYS: 8.5. Sample Miniature Clamped-Clamped Beam Analysis

Beam parameters:

• B_L=100 Beam length
• B_W=20 Beam width
• B_T=2 Beam thickness
• E_G=4 Electrode gap

Material properties <110> Si:

• MP,EX,1,169e3
• MP,NUXY,1,0.066
• MP,DENS,1,2.329e-15
• MP,ALPX,1,1e-6

Calculation of voltage displacement functions up to pull-in:

• Linear analysis: 992 volts
• Nonlinear analysis (stress stiffening is ON): 1270 volts
• Initial prestress analysis: 1408 volts
  • sigm_b=-100
  • tunif,sigm_b(1-0.066)/(169e31e-6)

There are two element loads: acceleration and a uniform pressure load:

• acel,,,9.81e12 ! acceleration in Z-direction 9.81e6 m/s**2
• sf,all,pres,0.1 ! uniform 100 kPa pressure load

Damping:

dm_1=0 and dm_2=0 in original model (see initial.vhd) !!!